褰撳姞鎷垮ぇ浜氫集杈剧殑鐗涚绉樺湴姝讳簬鐐柦鐥呮椂锛屼竴浣峈CMP鐨勫畼鍛樿瘯鍥捐鐗ф皯浠繚鎸佸钩闈欙紝涓嶈璐ｆ湴鏂圭殑鍐滀笟鐮旂┒锛屼竴鍚嶈鑰呭垯榧撳姳鐗ф皯鍒扮爺绌朵腑蹇冪殑闂ㄥ彛闈欏潗銆傚綋涓浣嶈佺墽姘戞浜庣偔鐤斤紝鎶楄鑰呰闅旂浜嗐傛病浜哄彂鐜拌鑰呮倓鎮勫湴娑堝け浜嗭紝闅忚韩杩樺甫鐫鍑犵摱瑁呯潃鐥呰弻鐨勭摱瀛愩備簬鏄疪CMP鐨勫畼鍛樺紑濮嬭嚜宸辫皟鏌ヨ繖浠朵簨锛屼粠缇庡浗鏀垮簻閭ｉ噷鏀堕泦璧勬枡锛屼粬蹇呴』鎶撶揣鏃堕棿浠ラ槻鐥呰弻浼犳挱銆         褰撳姞鎷垮ぇ浜氫集杈剧殑鐗涚绉樺湴姝讳簬鐐柦鐥呮椂锛屼竴浣峈CMP鐨勫畼鍛樿瘯鍥捐鐗ф皯浠繚鎸佸钩闈欙紝涓嶈璐ｆ湴鏂圭殑鍐滀笟鐮旂┒锛屼竴鍚嶈鑰呭垯榧撳姳鐗ф皯鍒扮爺绌朵腑蹇冪殑闂ㄥ彛闈欏潗銆傚綋涓浣嶈佺墽姘戞浜庣偔鐤斤紝鎶楄鑰呰闅旂浜嗐傛病浜哄彂鐜拌鑰呮倓鎮勫湴娑堝け浜嗭紝闅忚韩杩樺甫鐫鍑犵摱瑁呯潃鐥呰弻鐨勭摱瀛愩備簬鏄疪CMP鐨勫畼鍛樺紑濮嬭嚜宸辫皟鏌ヨ繖浠朵簨锛屼粠缇庡浗鏀垮簻閭ｉ噷鏀堕泦璧勬枡锛屼粬蹇呴』鎶撶揣鏃 灞曞紑鍏ㄩ儴